Today, we can enjoy many convenient lives brought by technology every day, most of which are thanks to semiconductors. Semiconductor components can be said to be the brains of modern technology applications. In addition to the familiar mobile phones and computers, AI, artificial intelligence, the internet of things, 5G, etc., which have grown rapidly in recent years, also require semiconductor materials as the core to produce integrated circuits. become.
What Are Semiconductors?
The semiconductor is a material with special physical properties. Its conductivity at room temperature is between that of a conductor and an insulator. Its conductivity can be changed by applying an external voltage. Semiconductors are not yet conductive without the application of an external voltage; if a voltage is applied to the material, the originally non-conductive material will become a conductive material, allowing current to pass through.
High Purity and No Pollution Requirements
The semiconductor industry, which is such an important and inseparable part of our lives, contains many precision integrated circuits and micro-electromechanical devices in its manufacturing process. To avoid affecting the electrical properties of the products, the manufacturing environment has strict requirements for cleanliness. Therefore, special attention must be paid to the process of transporting fluids to ensure that the manufacturing environment is maintained at a low pollution level so as not to affect product yield. If semiconductors are at the core of advanced technology development, then pumping can be called the core of semiconductor manufacturing.
Semiconductor Process
In the semiconductor wafer manufacturing process, some steps require reliable chemical pumps to meet high-quality production requirements. The following is a brief introduction to the manufacturing process of wafers and wafers.
Wafer Process:
slice
Ingot → wafer → grinding → cleaning → etching → polishing → cleaning → silicon wafer
Chip Manufacturing Process:
Silicon wafer → thin film deposition → coating with photosensitizer → photolithography → development → etching → photoresist removal
Application of Sealless Magnetic Pump in Semiconductor Manufacturing Process
1. Wafer cleaning:
The reason why wafers need to be cleaned is to wash away impurities such as dust particles, chemical pollutants, and metal residues on the surface, so as to ensure the electrical parameters and characteristics of semiconductor components and achieve reliable performance. quality.
Chemicals such as hydrochloric acid, sulfuric acid and hydrogen peroxide used in the cleaning process must maintain high purity, and these acid-base fluids are corrosive. Care must be taken to prevent leakage during transportation to avoid danger.
2. Development and etching:
In the wet process of wafers, as shown in the above steps, including development, etching, etc., developers and chemical solutions must be used. The cleanliness of these chemicals must be strictly controlled and attention must be paid to it. Corrosion and leakage problems during transportation.
3. Clean room:
Since today’s wafers already have nanometer-level manufacturing technology, if dust particles or contaminants fall on the wafer, it may damage the entire wafer circuit. Therefore, it is necessary to upgrade Product quality and yield requires strict prevention of dust particles from entering the process environment. In the clean room equipment of the wafer fab, pollution-free processing and reliability are the keys to the whole. Given the cleanliness requirements, certain types of clean room applications are suitable for the use of sealless magnetic pumps, plus the materials of the pumps. It is best to use PTFE or ETFE to prevent chemicals and ultrapure water from leaking from the pump and affecting the process.
4. Wastewater recovery and discharge system:
While semiconductors are booming, in the component manufacturing process, in order to take into account the safety of operators and achieve environmental sustainability, the discharge and recycling of chemicals have also become regulated by law. One ring.
Generally, the chemicals used in the semiconductor manufacturing process eventually become waste liquids, such as organic, inorganic, heavy metals and grinding wastewater, which need to be mixed and separated before they can be recycled and reused. When building a complete recycling and discharge system, the pumps used internally must also be strictly controlled. This can not only effectively prevent pollution problems caused by dangerous chemical liquid leakage, but also reduce operating costs and achieve optimal waste liquid recycling and Emissions treatment.
PTCXPUMP Sealless Magnetic Pump Can Be Safely Used In:
- Chemical supply equipment
- Internal process supply system
- Waste liquid treatment equipment
KUNG HAI ENTERPRISE CORP. PTCXPUMP sealless magnetic pump is used in the semiconductor industry to provide you with the best solution for conveying fluids. The sealless design is different from traditional mechanical seal pumps, which can effectively avoid leakage. In addition, the body and many parts are made of GFR-PP and CFR-ETFE, which has excellent corrosion resistance and is suitable for transporting acid and alkali liquids. High-risk fluids such as highly corrosive or flammable or explosive can be used in various equipment systems in the semiconductor industry.
In the PTCXPUMP sealless magnetic pump series, PTC-100 ~ PTC-251 are for small applications, and PTC-400 ~ PTC-675 are for medium and large applications. There are various models to meet your various operational needs. PTCXPUMP is committed to becoming your first choice for safe use of pumps.
Welcome to contact us, our professional team will work with you to select the best pump for your semiconductor process application.
The best solution for chemical fluid transportation》PTCXPUMP sealless magnetic pump / INNOMAG Lined Sealless Magnetic Pump
